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Chinese Researchers Develop Advanced ABF Crystal for Vacuum UV Laser Technology

SEMICONDUCTOR

A Chinese research team has developed ammonium fluorooxoborate (ABF), a high-performance crystal enabling lasers to reach a wavelength of 158.9 nanometers. This breakthrough, published in Nature, addresses a decade-long challenge in producing powerful, stable, and precise lasers for industrial applications, particularly in semiconductor manufacturing and aerospace engineering.

Chinese Researchers Develop Advanced ABF Crystal for Vacuum UV Laser Technology
Feb 12, 2026, 6:07 PM

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